CMS Gas Mass Flow Sensor
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- High level of accuracy
- Micro flow sensors
- Suitable for a range of gases
The CMS is a highly reliable and versatile series of gas mass flow meters that uses a µF (Micro Flow) sensor as its sensing element. The µF sensor is a MEMS thermal mass flow sensor capable of measuring ultra low flow rates. The integration of the µF sensor and advanced channel design technology has achieved high accuracy and high rangeability at a low cost.
Features of the CMS Gas Mass Flow Sensor include:
- Micro flow sensor offers high accuracy of ±3% RD (standard model)
- High resolution of 0.1 L/min
Functions include:
- flow rate/integrated flow rate indication
- analog ouptut,
- event output
- analog output scaling
- Micro flow sensor eliminates need for straight run piping upstream of meter
- Up to five CMS units can be connected to a single dedicated CMW100A multi-channel indicator
Other Applications:
- air
- nitrogen
- oxygen
- argon
- hydrogen
- helium
- carbon dioxide
- propane
- butane and more…
Specs
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Product Specification:
The CMS Gas Mass Flow Sensor is a highly reliable and versatile series of gas mass flow meters that uses a µF (Micro Flow) sensor as its sensing element.
Specification Detail of the CMS Gas Mass Flow Sensor:
Pipe Size
DN6 – DN25
Material Body
Aluminium & stainless steel
Flow Range
0.5 to 1500 l/min
Accuracy
0.2% 0.5% 1% dependant on gas on range
Operating Temp Range
-10 to 60ᵒC
Pressure Range
0.07 -1Mpa
Outputs & Comms
4/20mA 0-5V 1-5V + 2x pulse user selectable
Insertion / Inline
Inline
Gas Type
Air, nitrogen, argon, carbon dioxide, oxygen, methane, helium hydrogen
Applicable Liquids
N/a
Power
12-24VDC
Approvals
CE
Connection Type
9/16 – 18 UNF Rc ¼” ¼” – ½” 1” Swagelok 1/3 VCR or equivalent