The d-flux multi series 2 is high performance fast and reliable multi-parameter mass flow meter and controller for gases with measurement outputs for mass, volumetric and normalised flow, pressure and temperature. One of the many advantages of this laminar flow meter is the ability to easily switch to a different gas without a loss in accuracy.
This unique meter is also designed for optimum performance across a wide dynamic Min/Max flow range of up to 1000:1 (Available for meter only)
The d-flux meter / controller is also designed for installations with minimal upstream downstream piping installations
Features of the d·flux multi series 2:
- The unit is available as meter or with a integrated control valve (Controller)
- Flow rates up to 1400 ln/min (2900 ln/min Hydrogen)
- Multiple pre-programmed gases
- State-of-the-art communication
- Wide application scope IP54
- Wireless device access with the free Vögtlin Connect app(Android)
- Alarm, warning and diagnostic features
- High accuracy, sample rate and fast response
- Minimum Inlet required
- Custom application profiles
- Introducing Vögtlin Automated Dynamics VADy®
| Standard ranges (air / user adjustable)¹ | LFE1400 from 0-1000 ln/min to 0-1400 ln/min LFE1000 from 0-700 ln/min to 0-1000 ln/min LFE700 from 0-500 ln/min to 0-700 ln/min LFE500 from 0-350 ln/min to 0-500 ln/min |
| Gases | Max. range | Core | Prime | Prime H2 |
| Air | 0-1400 ln/min | ✓ | ✓ | ✓ |
| N2 | 0-1400 ln/min | ✓ | ✓ | ✓ |
| Ar | 0-1240 ln/min | ✓ | ✓ | ✓ |
| O2³ | 0-1400 ln/min | ✓ | ✓ | ✓ |
| He | 0-1400 ln/min | ✓ | ✓ | |
| CO2 | 0-740 In/min | ✓ | ✓ | |
| CO | 0-1390 In/min | ✓ | ✓ | |
| H2 | 0-2900 In/min | ✓ |
Specs
Contact Us Today To Enquire About Our Products And Services
Specification Detail of the d⋅flux Mass Flow Meter | Controller:
Measuring Ranges
Standard ranges
(air / user adjustable)
LFE1400 from 0-1000 ln/min to 0-1400 ln/min
LFE1000 from 0-700 ln/min to 0-1000 ln/min
LFE700 from 0-500 ln/min to 0-700 ln/min
LFE500 from 0-350 ln/min to 0-500 ln/min
Accuracy
0.5% of user full scale + 1% of measured value (after tare at operating conditions)
Media
All gases and gas mixtures that are compatible with the selected materials.
The device is not suitable for Hydrogen, Helium, corrosive and explosive gases.
Repeatability
± 0.2% of factory full scale (according to SEMI standard E56-0309)
Longterm Stability
Typical < 0.2% of measured value / year after tare
Power Supply Meter
15-36 Vdc, (200 mA@24Vdc, regulated) / Controller: 24 Vdc ±10%, (2000mA@24Vdc, regulated)
Power in through M8-4P connection or optionally through D-sub connection
(ripple should not exceed 100 mV peak-to-peak) We recommend that the body of this unit is properly connected to ground
Operation Pressure
1 to 14 bar a
Temperature
environment/gas) -20 to +60 °C (-4 to 140 °F)
Humidity gas
0-95% Rh (non-condensing)
Pressure sensitivity
< 0.08% FFS5+0.1% MV per bar (typical air)
Temperature sensitivity
<0.02% FFS* per 1 °C of inlet gas temperature @ 7 bar a pressure
Accuracy temperature
Typically ± 0.5 °C (not certified)









